Growth of Nb3Sn coating in tin vapor-diffusion process
نویسندگان
چکیده
منابع مشابه
Thickness Dependence of Sensitivity in Thin Film Tin Oxide Gas Sensors Deposited by Vapor Pyrolysis
Transparent SnO2 thin films were deposited on porcelain substrates using a chemical vapor deposition technique based on the hydrolysis of SnCl4 at elevated temperatures. A reduced pressure self-contained evaporation chamber was designed for the process where the pyrolysis of SnCl4 at the presence of water vapor was carried out. Resistive gas sensors were fabricated by providing ohmic contacts o...
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology A
سال: 2019
ISSN: 0734-2101,1520-8559
DOI: 10.1116/1.5113597